JPH0525708Y2 - - Google Patents

Info

Publication number
JPH0525708Y2
JPH0525708Y2 JP1988124299U JP12429988U JPH0525708Y2 JP H0525708 Y2 JPH0525708 Y2 JP H0525708Y2 JP 1988124299 U JP1988124299 U JP 1988124299U JP 12429988 U JP12429988 U JP 12429988U JP H0525708 Y2 JPH0525708 Y2 JP H0525708Y2
Authority
JP
Japan
Prior art keywords
air
opening
processing chamber
air supply
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988124299U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245140U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988124299U priority Critical patent/JPH0525708Y2/ja
Publication of JPH0245140U publication Critical patent/JPH0245140U/ja
Application granted granted Critical
Publication of JPH0525708Y2 publication Critical patent/JPH0525708Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1988124299U 1988-09-22 1988-09-22 Expired - Lifetime JPH0525708Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988124299U JPH0525708Y2 (en]) 1988-09-22 1988-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988124299U JPH0525708Y2 (en]) 1988-09-22 1988-09-22

Publications (2)

Publication Number Publication Date
JPH0245140U JPH0245140U (en]) 1990-03-28
JPH0525708Y2 true JPH0525708Y2 (en]) 1993-06-29

Family

ID=31373913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988124299U Expired - Lifetime JPH0525708Y2 (en]) 1988-09-22 1988-09-22

Country Status (1)

Country Link
JP (1) JPH0525708Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220041Y2 (en]) * 1985-02-27 1990-06-01

Also Published As

Publication number Publication date
JPH0245140U (en]) 1990-03-28

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